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1 This Guide applies to equipment constructed for the purpose of manufacturing semiconductor devices
the requirements are presented as guides
SEMI E125 — Specification for Equipment Self Description (EQSD)
worldwide means to describe pressure parameters as they relate to mass flow controllers (MFC)
will support the creation of results that can be compared from one production line to another
D01200 - SEMI D12 - FPD基板のエッジ状態の仕様 Revision:SEMI D12-95 (Reapproved 0703) - Inactive 1 This Guide applies toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Flat Panel Display Global Technical CommitteeJapanese FPD Materials and Components Committee2003428Japanese Regional Standards Committee20036www. semi. org200371995 NOTICE: This Standard or Safety Guideline has an Inactive Status