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26-84 (first published)
Filter performance stability is addressed by repeating the performance test throughout the operating lifetime of the filter
orgで入手可能となる。初版は1978年発行。前版は2006年3月発行。
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This Specification is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure glass as base material to be used in a 3DS-IC process or in similar applications
C00320 - SEMI C3.20 - Specification for Helium (He), in Cylinders, 99.9995% StdPbc-0519 26-84 (first published)The purpose of this Document is to provide specifications for helium (He) that is used in the semiconductor industry. This Document covers requirements for helium used in the semiconductor industry. Referenced SEMI Standards SEMI C3 Specification for Gases