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P04600 - SEMI P46 - XMLによるフォトマスクのCD計測情報データの仕様 Revision:SEMI P46-0706 - Superseded mixed acid etchants

SKU: 72091130202

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Description

mixed acid etchants

On the other hand equipment suppliers could reduce their effort for developing and maintaining a variety of equipment communication interfaces

org in June 2007

Certification

4-1022 (Reapproved 0224)

P04600 - SEMI P46 - XMLによるフォトマスクのCD計測情報データの仕様 Revision:SEMI P46-0706 - Superseded mixed acid etchantsglobal Micropatterning Committeeglobal Audits and Reviews Subcommittee200651620066www. semi. org 20067CD ROM XMLCD Referenced SEMI Standards SEMI P10 Specification of Data Structures for Photomask Orders SEMI P41 Specification for Mask Defect Data Handling with Xml, Between Defect Inspection Tools, Repair Tools, and Review Tools

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