C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded 35-1109 (technical revision)

35-1109 (technical revision)

previously published November 2002

If differences should exist between the English version and a translation in any other language

Colloidal silica has a relatively narrow size distribution and has lower interaction with filter material

The filter cartridges are separable from the housings which can be cleaned and tested independently

C09000 - SEMI C90 - Specification for Perfluoroalkoxy Alkane (PFA) and Other Fluorinated Materials Used In Liquid Chemical Distribution Systems Revision:SEMI C90-1015 - Superseded 35-1109 (technical revision)1 Purpose 1. 1 This standard specifies extraction limits for metals from liquid chemical distribution system components (e. g., tubing, fittings, and valves). 1. 2 This standard specifies procedures to measure extractable metal impurities from perfluoroalkoxy alkane (PFA) and other fluorinated materials and from high purity liquid distribution components. 2 Scope 2. 1 This Standard applies to the determination of metal extractable impurity