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SEMI C96-0618 (first published)
SEMI C40-1105 (technical revision)
Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation
particularly SEMI P35
1 This Test Method uses Euclidean techniques
C00357 - SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders StdPbc-0519 SEMI C96-0618 (first published)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www. semiviews. org and www. semi. org in June 2018; originally published June 2000; previously published March 2012. The purpose of this Document is to provide specification for carbon dioxide (CO2) that is used in the semiconductor industry. This
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