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1-0302 (technical revision)
Only the physical interfaces for the MRSP150 are specified
org in July 2006
SEMI D68-0719 (Reapproved 0925)
An eddy-current gauge directly measures conductance of a specimen
P03900 - SEMI P39 - Specification for OASIS® – Open Artwork System Interchange Standard Revision:SEMI P39-0308 - Superseded 1-0302 (technical revision)The purpose of this Specification is to define an interchange and encapsulation format for hierarchical integrated circuit mask layout information. Background In the fall of 2001, SEMIs Data Path Task Force formed a working group to define a successor to the venerable GDSII Stream format, which had served the I. C. industry as a de facto standard for layout interchange for more than two decades. The old format, limited by 16 bit and 32 bit internal
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