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C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Revision:SEMI C3.29-0200 (Withdrawn 0303) - Replaced 12-86 (technical revision)

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Description

12-86 (technical revision)

The first stack (refer to Figure 1) is a BWS pair of 775 µm thick wafers following TSV formation and the bonding operation

1 mm thick (max) in a flat panel display (FPD) manufacturing facility

34-92 (technical revision)

orgで入手可能になり。初版は1993年発行。前版は1994年発行。

C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Revision:SEMI C3.29-0200 (Withdrawn 0303) - Replaced 12-86 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15, 1999. Available at www. semi. org in September 1999; originally published in 1986; previously published in 1996. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas

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