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The purpose of this Document is to provide a guide for pentakis dimethylamino tantalum (PDMAT) for which a need has been identified
This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17
This Document is intended for TSVs in silicon
and Korean
previously published November 2008
C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality StdPbc-0421 The purpose of this DocumentNOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70. Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 26 0301 (Withdrawn 0312, replaced by SEMI C70) SEMI C3. 26 0301 (technical revision) SEMI C3. 26 94 (technical revision) SEMI C3. 26 93 (technical