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SEMI G2-82 (technical revision)
The purpose of the Object Services Standard (OSS) is to provide general terminology
SEMI MF42-0316 (Reapproved 0921)
Other measurement techniques may also provide similar information
本ガイドには，以下の内容が含まれる。
PV10200 - SEMI PV102 - Guide for Tube PECVD Graphite Boat Materials for Solar Cell Production Revision:SEMI PV102-0125 - Current SEMI G2-82 (technical revision)1 Purpose 1. 1 This Standard develops material guidelines for tube plasma enhanced chemical vapor deposition (PECVD) graphite boats, providing guidance and material performance testing for material manufacturers, processing manufacturers, and battery cell manufacturers. The high reliability of graphite boats is the goal to meet the needs of tubular PECVD process. 2 Scope 2. 1 This Standard provides recommendations for various property values and